Structure coating based on B, Ti and Si and synthesized by plasma assisted vacuum arc method on solid-state substrate
DOI:
https://doi.org/10.54708/26587572_2026_832657Keywords:
multi-element composition, nanostructured coating, vacuum arc method, plasma assistance, phase composition, defective substructureAbstract
The analysis of the triple diagram of the Ti-Si-B system state was carried out and the possibility of the formation of two three-element boron-containing compounds of the Ti5Si3(B) and Ti6Si2B composition along with two-element was revealed. Amorphous-crystalline (crystallite size of 2.5–3.5 nm) multi-element (Ti-Si-B) coatings of complex phase composition are formed by the vacuum-arc method with plasma assistance. To generate gas-metal plasma, from which the coating was formed, an electric arc evaporator with a cylindrical multicomponent cathode based on Ti, Si, and B, as well as a PINK source of gas plasma with thermionic and hollow cathodes were used.References
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